Recently, the domestically produced electron beam lithography machine, known as the "nano magic pen", was officially unveiled in Yuhang, Hangzhou. This device was independently developed by the Yuhang Quantum Research Institute of Zhejiang University, with the model number "Xizhi". It has completed research and development and entered the application testing stage, marking a major breakthrough in China's high-end chip research and development core equipment field.

The name "Xizhi" comes from the ancient Chinese calligraphy master Wang Xizhi, symbolizing the use of electron beams instead of brushes to "write and paint" on chips. Its performance has reached the international mainstream level, providing an independent and controllable "cutting edge" for the research and development of high-end devices such as quantum chips in China.

It is reported that as one of the first batch of incubation projects signed by the base, "Xizhi" is a new generation 100kV electron beam lithography machine that looks like a large steel cabinet, with real-time parameters constantly flashing on the electronic display screen, focusing on the cutting-edge process development of quantum chips and new semiconductor devices. It does not require a mask and directly "handwrite" circuits on the surface of silicon wafers through high-energy electron beams, with an accuracy of up to 0.6nm and a line width of only 8nm. It can be modified multiple times, greatly improving research and development efficiency.

According to the head of the R&D team, this is not just a device, but more like a nano brush that can carve the entire city map on a strand of hair, like Wang Xizhi's precise painting on a chip, making the efficiency of quantum chip R&D and debugging soar. Compared with traditional lithography machines, electron beam lithography machines have unique advantages in prototype design, rapid iteration, and small-scale trial production. In the early stage of chip development, many patterns and designs are designed, often requiring modification line by line. Electron beam lithography machines have high precision and convenient 'writing', greatly improving the efficiency of repeated debugging in the early stage of chip development

Previously, advanced electron beam lithography equipment was subject to international export controls, and top domestic scientific research institutions and enterprises were unable to purchase it for a long time. The landing of "Xizhi" completely broke this dilemma, and has now been in contact with domestic enterprises and multiple scientific research institutions. This domestically produced equipment not only fills the domestic gap, but also builds a complete domestic substitution chain.

In terms of pricing strategy, "Xizhi" has shown obvious market competitiveness - lower than the international market average price. Currently, it has been in contact with companies such as Huawei HiSilicon and multiple research institutions.

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